Profile measuring apparatus, structure manufacturing system, method for measuring profile, method for manufacturing structure, and non-transitory computer readable medium

ABSTRACT

There is provided a profile measuring apparatus, including: an irradiation section configured to irradiate a measurement light to a measurement area of the object; an imaging section configured to obtain an image of the measurement area; a table configured to place the object thereon; a coordinate calculation section configured to calculate a position of the measurement area based on an image detected by a detection section; and a positioning mechanism configured to drive and control a relative position of the imaging section and the table. The positioning mechanism calculates a relative position of the imaging section to the table, based on an information with respect to an edge line direction of a convex portion or an extending direction of a concave portion in the measurement area of the object having a repetitive concave-convex shape, to move at least one of the table and the imaging section.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application claims priority from U.S. Provisional PatentApplication No. 61/616,266 filed on Mar. 27, 2012 and claims priorityfrom Japanese Patent Application No. 2011-262838 filed on Nov. 30, 2011,all the disclosures of which are incorporated herein by reference intheir entirety.

BACKGROUND

Field of the Invention

The present invention relates to a profile measuring apparatus, a methodfor measuring a profile, a structure manufacturing system, a method formanufacturing a structure and non-transitory computer readable mediumstoring a program thereof.

Description of the Related Art

There has been conventionally known a profile measuring apparatus whichmeasures the profile of the surface of an object to be measured having acomplicated profile, such as a gear and a turbine, by a contact sensor.Such a profile measuring apparatus measures the profile of the surfaceof the object by converting the position of the contact sensor in astate of being brought in contact with the surface of the object tospace coordinates of the surface of the object (see, for example,Japanese Patent Publication No. 08-025092).

SUMMARY

According to an aspect of the present teaching, there is provided aprofile measuring apparatus which measures a profile of an object,including:

-   -   an irradiation section configured to irradiate a measurement        light to a measurement area of the object;    -   an imaging section optically connected to the irradiation        section and configured to obtain an image of the measurement        area including a position to which the measurement light is        irradiated by the irradiation section;    -   a table configured to place the object thereon;    -   a coordinate calculation section communicatably connected to the        imaging section and configured to calculate a position of the        measurement area based on an image detected by a detection        section; and    -   a positioning mechanism configured to drive and control a        relative position of the imaging section and the table relative        to each other,        -   wherein the positioning mechanism calculates the relative            position of the imaging section to the table, based on an            information with respect to an edge line direction of a            convex portion or an extending direction of a concave            portion in the measurement area of the object having a            repetitive concave-convex shape, to move at least one of the            table and the imaging section relative to each other.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing a configuration of a profile measuringapparatus according to the first embodiment of the present teaching.

FIG. 2 is a block diagram showing the configuration of the profilemeasuring apparatus of the first embodiment.

FIGS. 3A and 3B are configuration diagrams each showing a direction inwhich a profile of an object to be measured (spur gear) is measuredaccording to the first embodiment.

FIGS. 4A and 4B are configuration diagrams each showing a direction inwhich a profile of an object to be measured (helical gear) is measuredaccording to the first embodiment.

FIGS. 5A and 5B are configuration diagrams each showing a direction inwhich a profile of an object to be measured (bevel gear) is measuredaccording to the first embodiment.

FIGS. 6A and 6B are configuration diagrams each showing a direction inwhich a profile of an object to be measured (spiral bevel gear) ismeasured according to the first embodiment.

FIGS. 7A and 7B are configuration diagrams each showing a direction inwhich a profile of an object to be measured (worm gear) is measuredaccording to the first embodiment.

FIG. 8 is a flowchart showing an operation of a control section of thefirst embodiment.

FIG. 9 is a flowchart showing a method for measuring a profile of anobject.

FIG. 10 is a configuration diagram showing a configuration of a profilemeasuring apparatus according to the second embodiment of the presentteaching.

FIG. 11 is a configuration diagram showing an irradiation direction oflight toward the object (helical gear).

FIG. 12 is a configuration diagram showing a configuration of astructure manufacturing system according to the third embodiment of thepresent teaching.

FIG. 13 is a flowchart showing an operation of the structuremanufacturing system of the third embodiment.

DESCRIPTION OF THE EMBODIMENTS

<First Embodiment>

Hereinbelow, an explanation will be made about embodiments of thepresent teaching with reference to drawings. FIG. 1 schematically showsa configuration of a profile measuring apparatus 100 according to anembodiment of the present teaching. The profile measuring apparatus 100includes a measuring apparatus main body 1 and a control unit 40 (seeFIG. 2). FIG. 2 shows a block diagram of the measuring apparatus mainbody 1 and the control unit 40 according the embodiment of the presentteaching.

As shown in FIG. 1, the measuring apparatus main body 1 includes a base2 having a horizontal upper surface (reference plane), a movementsection 10 which is provided on the base 2 and supports and moves ameasurement head 13, and a support device 30 which is provided on thebase 2 and on which an object to be measured 3 (hereinafter referred tosimply as “object 3”) is placed. The profile measuring apparatus 100 ofthis embodiment measures the profile of the surface of the object 3,such as a gear and a turbine, having a concave-convex shape which isperiodically aligned in a circumferential direction and extends in adirection different from the circumferential direction. In particular,the gear, the turbine, and the like each have the profile as follows.That is, in the profile which is projected from a vertical directiononto a plane parallel to the circumferential direction, edge lines ofconvex portions and valley lines of concave portions extend radiallywith respect to the center, at the circumferential portion of theprofile. Therefore, an example of an extending direction of theconcave-convex shape is exemplified by the edge lines of the convexportions and the valley lines of the concave portions. Here, arectangular coordinate system which is based on the reference plane ofthe base 2 is defined. An X-axis and a Y-axis orthogonal with each otherare defined to be parallel to the reference plane; and a Z-axis isdefined in a direction perpendicular to the reference plane. Further, aguide rail (not shown) extending in the Y direction (which is adirection perpendicular to the sheet surface of FIG. 1, this directionis supposed to be a front-rear direction) is provided in the base 2.

The movement section 10 (a second movement section) is movably providedon the guiderail in the Y direction and includes a brace member (strut)10 a and a horizontal frame 10 c, which is wound to extend horizontallybetween the brace member 10 a and a brace member (strut) 10 b forpairing with the brace member 10 a, to form a gate-shaped structure.Further, the movement section 10 includes a carriage (not shown) whichis movable in the horizontal frame 10 c in the X direction (left-rightdirection) and the measurement head 13 which is movable in the Zdirection (up-down direction) with respect to the carriage.

A detection section 20 (holding section) which detects the profile ofthe object 3 is provided on a lower portion of the measurement head 13.The detection section 20 is supported by the measurement head 13 todetect a distance from the object 3 disposed below the detection section20. By controlling the position of the measurement head 13, it ispossible to move the position of the detection section 20. Further, ahead rotation mechanism 13 a which rotates the detection section 20around an axis parallel to the Z-axis direction is provided between thedetection section 20 and the carriage.

In the movement section 10, there are provided a head driving section 14(see FIG. 2) which electrically moves the measurement head 13 in threedirections (X, Y, Z directions) based on a driving signal inputted and ahead position detection section 15 (see FIG. 2) which detectscoordinates of the measurement head 13 to output the signal indicatingcoordinate values of the measurement head 13.

The support device 30 is provided on the base 2. The support device 30includes a stage 31 and a support table 32. The object 3 is placed onand held by the stage 31. The support table 32 rotatably supports thestage 31 around rotational axes in two directions orthogonal with eachother so that the stage 31 can be horizontally rotated and can be tiltedwith respect to the reference plane. The support table 32 of thisembodiment supports the stage 31 so that the stage 31 is rotatable inthe A-direction as shown in FIG. 1 in the horizontal plane with arotational axis θ extending vertically (in the Z direction) as arotation center and is rotatable in the B-direction as shown in FIG. 1with a rotational axis φ extending horizontally (in the X direction) asthe rotation center.

There are provided, in the support device 30, a stage driving section 33(movement section, first movement section) (see FIG. 2) whichelectrically drives and rotates the stage 31 around the rotational axisθ and the rotational axis φ based on the driving signal inputted and astage position detection section 34 (see FIG. 2) which detects thecoordinates of the stage 31 to output the signal indicating stagecoordinate values.

The control unit 40 includes a control section 41, an input device 42,and a monitor 44. The control section 41 controls the measuringapparatus main body 1. Details will be described later. The input,device 42 is exemplified by a keyboard and the like through whichvarious kinds of instruction information is inputted. The monitor 44displays a measurement screen, an instruction screen, a measurementresult, and the like thereon.

Subsequently, an explanation will be made about the structure of themeasuring apparatus main body 1 with reference to FIG. 2. The measuringapparatus main body 1 includes a driving section 16, a positiondetection section 17, and the detection section 20 (holding section).

The driving section 16 includes the head driving section 14 and thestage driving section 33 (movement section). The head driving section 14includes a Y-axis motor which drives the brace members 10 a, 10 b in theY direction, an X-axis motor which drives the carriage in the Xdirection, a Z-axis motor which drives the measurement head 13 in the Zdirection, and a head rotating motor which rotates the detection section20 with respect to the axis parallel to the Z-axis direction. The headdriving section 14 receives the driving signal supplied from a drivingcontrol section 54 as will be described later. The head driving section14 electrically moves the measurement head 13 in the three directions(X, Y, Z directions) based on the driving signal. The stage drivingsection 33 (movement section) includes a rotary axis motor which drivesand rotates the stage 31 around the rotational axis θ and a tilt axismotor which drives and rotates the stage 31 around the rotational axis.Further, the stage driving section 33 receives the driving signalsupplied from the driving control section 54 to electrically rotate thestage 31 around the rotational axis θ and the rotational axis φ based onthe driving signal received. The stage driving section 33 relativelymoves the position of the object 3 to which a measurement light isirradiated in a movement direction DR3 (third direction) of thedetection section 20 (holding section) which is determined correspondingto a circumferential direction. The stage driving section 33 moves thedetection section 20 in the movement direction DR3 of the detectionsection 20 relative to the object 3. The stage driving section 33 movesand rotates the object 3 so that a central axis AX of the object 3coincides with the rotational axis θ of rotational movement.

For example, in a case that the profile of the gear as the object 3 ismeasured, the stage driving section 33 (movement section, first movementsection) relatively moves the position of the object 3 to which themeasurement light is irradiating the movement direction DR3 (thirddirection) of the detection section (holding section) which isdetermined corresponding to a direction of a tooth width of a tooth ofthe gear.

The position detection section 17 includes the head position detectionsection 15 and the stage position detection section 34. The headposition detection section 15 includes an X-axis encoder, a Y-axisencoder, a Z-axis encoder, and a head rotation encoder which detectpositions of the X-axis, the Y-axis, and the Z-axis directions of themeasurement head 13 and a setting angle of the head, respectively. Thehead position detection section 15 detects the coordinates of themeasurement head 13 by these encoders to supply the signals indicatingthe coordinate values of the measurement head 13 to a coordinatedetection section 51 as will be described later. The stage positiondetection section 34 includes a rotary-axis encoder and a tilt-axisencoder which detect rotation positions around the rotational axis θ andthe rotational axis φ of the stage 31, respectively. The stage positiondetection section 34 detects the rotation positions around therotational axis θ and the rotational axis φ of the stage 31 by usingthese encoders to supply the signals indicating the detected rotationpositions to the coordinate detection section 51.

The detection section 20 (holding section) includes an optical probe 20Ahaving an irradiation section 21 and an imaging section 22 to detect theprofile of the surface of the object 3 by an optical cutting method.That is, the detection section 20 (holding section) holds theirradiation section 21 and the imaging section 22 so that a relativeposition between the irradiation section 21 and the imaging section 22is not changed. The irradiation section 21 irradiates the measurementlight having a predetermined light amount distribution to a measurementarea of the object (surface of the object) in accordance with anirradiation direction DR1 (first direction) which is determinedcorresponding to a normal direction of the surface of the object 3,based on a control signal which controls irradiation of the light,supplied from an interval adjustment section 52 as will be describedlater on. The measurement light includes, for example, a light amountdistribution which is formed in a line form in a case that themeasurement light is irradiated to the horizontal plane. In this case,the measurement light irradiated to the object 3 is formed byprojecting, onto the object 3, a linear projection pattern in which alongitudinal direction is set depending on the concave-convex shape ofthe object 3. The head rotation mechanism 13 a is driven and controlledso that the longitudinal direction is to be the direction as describedabove. Such a measurement light can be formed in the line form, forexample, by refracting or sweeping the light emitted from a point lightsource. An optical cutting line PCL is formed on the surface of theobject 3 by the measurement light formed in the line form. That is, theoptical cutting line PCL is formed depending on the profile of thesurface of the object 3.

For example, in a case that the profile of the gear as the object 3 ismeasured, the irradiation section 21 irradiates the measurement light,which has a light amount distribution depending on the profile of thesurface of the tooth of the gear as the object 3, to a tooth plane ofthe tooth from the irradiation direction DR1 (first direction) which isdetermined corresponding to a normal direction of the tooth plane. Inthis case, the optical cutting line PCL is formed depending on theprofile of the surface of the object 3 (for example, profile of thetooth plane of the gear).

The imaging section 22 generates an image by taking the image of themeasurement light from an imaging direction DR2 (second direction) whichis determined corresponding to a predetermined direction of the surfaceto which the measurement light is irradiated (a direction different fromthe circumferential direction of the object 3). For example, the imagingsection 22 of this embodiment generates the image by taking the image ofthe measurement light from the extending direction of the concave-convexshape of the object 3 which is supposed to be the imaging direction DR2.Here, in a case that the object 3 is the gear, the extending directionof the concave-convex shape of the object 3 (namely, tooth of the gear)is, for example, a direction of a ridge line of a tooth of the gear. Inthis case, the imaging section 22 of this embodiment generates, as ataken image, an image of the tooth plane to which the measurement lightis projected from the direction of the ridge line of the tooth of thegear as the object 3. As described above, the imaging section 22 takesthe image of the optical cutting line PCL formed on the surface of theobject 3 by the irradiation light, from the irradiation section 21.Although the imaging direction DR2 is set corresponding to the extendingdirection of the concave-convex shape of the object 3, the imagingdirection DR2 is not necessarily required to coincide with the extendingdirection of the concave-convex shape. The imaging direction DR2 can bea direction in which the concave portion or the convex portion of ameasurement portion is not hidden by each adjacent convex portion asviewed from the imaging section 22.

The imaging section 22 takes the image of a shadow pattern formed on thesurface of the object 3 to supply information of the image to theinterval adjustment section 52. Accordingly, the control unit 40 obtainsprofile measurement data. The imaging section 22 includes a solid-stateimaging device such as a charge coupled device (CCD) and a complementarymetal oxide semiconductor (C-MOS) sensor.

For example, in the case that the profile of the gear as the object 3 ismeasured, the imaging section 22 generates the image by taking the imageof the optical cutting line from the imaging direction DR2 (seconddirection) which is determined corresponding to the direction of theridge line of the tooth of the tooth plane to which the measurementlight is irradiated.

Subsequently, the control unit 40 will be explained. As described above,the control unit 40 includes the control section 41, the input device42, and the monitor 44. The input device 42 includes the keyboardthrough which various kinds of instruction information is inputted by auser. The input device 42 detects, for example, the instructioninformation inputted in the keyboard; and writes the detectedinstruction information into a storage section 55 so that the detectedinstruction information is stored in the storage section 55. Forexample, the type of the object 3 is inputted as the instructioninformation in the input device 42 of this embodiment. For example, in acase that the object 3 is the gear, the type of the gear as the type ofthe object 3 (for example, a spur gear SG, a helical gear HG, a bevelgear BG, a spiral bevel gear SBG, and a worm gear WG) is inputted as theinstruction information in the input device 42.

The monitor 44 receives measurement data (coordinate values of all ofthe measurement points) supplied from a data output section 57 and thelike. The monitor 44 displays the received measurement data (coordinatevalues of all of the measurement points) and the like, thereon. Further,the monitor 44 displays the measurement screen, the instruction screen,and the like thereon.

The control section 41 includes the coordinate detection section 51, theinterval adjustment section 52, a coordinate calculation section 53(measurement section), the driving control section 54, the storagesection 55, a movement command section 56, the data output section 57,and a position setting section 58.

In the storage section 55, for each of the types of the objects 3, theposition in the extending direction of the concave-convex shape of theobject 3 is associated with information, which indicates the extendingdirection of the concave-convex shape for each position in the extendingdirection of the concave-convex shape, and the association is stored inadvance. In the storage section 55 of this embodiment, for example, foreach of the types of the gears, the position in the direction of theridge line of the tooth of the gear is associated with information,which indicates the direction of the ridge line of the tooth for eachposition in the direction of the ridge line of the tooth, and theassociation is stored in advance. That is, the movement direction of themeasurement point is associated with the type of the gear and theassociation is in advance stored in the storage section 55. In thestorage section 55, for each of the types of the objects 3, coordinatevalues of a position for starting the measurement (first measurementpoint) of the object 3, coordinate values of a position for completingthe measurement (last measurement point) of the object 3, and a spacingdistance between each measurement point are associated with the type ofthe object 3 and the association is stored in advance. Point group dataof three-dimensional coordinate values supplied from the coordinatecalculation section 53 is held in the storage section 55 as themeasurement data. Coordinate information of each measurement pointsupplied from the coordinate detection section 51 is held in the storagesection 55. Design data (CAD data) is held in the storage section 55. Asdescribed below, the position setting section 58 obtains the directionof the ridge line (of the tooth) of the object 3 from the design dataheld in the storage section 55, and outputs the obtained data for thedirection of the ridge line of the object 3 to the movement commandsection 56.

The coordinate detection section 51 detects, based on the coordinatesignal outputted from the head position detection section 15, theposition of the optical probe 20A supported by the head positiondetection section 15, that is, an observation position in the horizontaldirection and an observation position in the up-down direction, and theimaging direction of the optical probe 20A. The coordinate detectionsection 51 detects, based on the signal indicating the rotation positionoutputted from the stage position detection position 34, rotationpositions around the rotational axis θ and the rotational axis φ of thestage 31. The coordinate detection section 51 detects coordinateinformation based on information of the observation position in thehorizontal direction and information of the observation position in theup-down direction detected respectively, and information indicating therotation positions outputted from the stage position detection section34 (rotation position information of the stage 31). The coordinatedetection section 51 supplies the coordinate information and the imagingdirection of the optical probe 20A and the rotation position informationof the stage 31 to the coordinate calculation section 53. The coordinatedetection section 51 detects, based on the coordinate information andthe imaging direction of the optical probe 20A and the rotation positioninformation of the stage 31, information of a relative movement routebetween the optical probe 20A and the stage 31, information of arelative movement velocity between the optical probe 20A and the stage31, and information as to whether or not the movement is stopped, andthe like; and supplies the detected information to the movement commandsection 56.

The interval adjustment section 52 reads data specifying samplingfrequency on the storage section 55 before the measurement ofcoordinates is started. The interval adjustment section 52 receives theimage information from the imaging section 22 at the sampling frequency.Then, the interval adjustment section 52 supplies to the coordinatecalculation section 53 image information for calculating the profiledata of the surface of the object 3 in which one or more frames is/arethinned out from the received image information.

The interval adjustment section 52 includes an imaging-section controlsection 52A. The imaging-section control section 52A changes an intervalof taking images (an imaging interval) of the imaging section 22depending on the position in a radial direction of the rotationalmovement of the object 3 to which the illumination light is irradiated.For example, in a case that the position in the radial direction of therotation direction of the object 3 to which the measurement light isirradiated is close to the outermost circumference, the imaging-sectioncontrol section 52A makes the imaging interval of the imaging section 22(that is, a time interval to take the image of the object 3 by the imagesection 22) shorter than that of a case in which said position is closeto the rotational center. As described above, in a case that an exposuretime of the imaging section 22 is sufficiently short to an extent thatthere is no blurring in the taken image, even when the image is taken inthe case that the position in the radial direction of the rotationalmovement of the object 3 to which the measurement light is irradiated isat the outermost circumference, the imaging-section control section 52Achanges the imaging interval. Accordingly, the profile measuringapparatus 100 is capable of measuring the profile without changingvelocity of the rotational movement of the object 3. The imaginginterval is preferably varied based on the length of the measurementlight in the longitudinal direction in a case that the measurement lightis irradiated to the object 3 (or the length of when the measurementlight is projected in the radial direction) and a rotational linearvelocity at the measurement position.

The driving control section 54 outputs the driving signal to the headdriving section 14 to drive and control the measurement head 13 based ona command signal from the movement command section 56. The drivingcontrol section 54 includes a movement control section 54A and avelocity control section 54B. The movement control section 54Arelatively rotates the object 3 in the movement direction DR3 (thirddirection) of the detection section 20 (holding section) which isdetermined corresponding to the circumferential direction of the object3 to move the position to which the measurement light is irradiated. Themovement control section 54A of this embodiment rotates, for example,the gear as the object 3 in the movement direction DR3 (namely, thecircumferential direction of the gear) which is determined to coincidewith the circumferential direction of the gear to move the position towhich the measurement light is irradiated. That is, the movement controlsection 54A relatively rotates the gear in the movement direction DR3(third direction) of the detection section 20 to relatively move theposition to which the measurement light is irradiated in the movementdirection DR3 of the detection section 20. Accordingly, the profilemeasuring apparatus 100 of this embodiment successively irradiates themeasurement light to each concave-convex shape (for example, each toothof the gear or each blade of the turbine as the object 3) which isperiodically aligned in the circumferential direction of the object 3and extends in the direction different from the circumferentialdirection to measure the profile of the surface of the object 3.

The velocity control section 54B controls the movement velocity forrelatively rotating the object 3 depending on the position in astage-radius rs direction (radial direction) of the rotational movementof the object 3 to which the measurement light is irradiated. Forexample, in a case that the profile of the bevel gear BG as the object 3is measured, the velocity control section 54B of this embodimentcontrols rotational movement velocity of the stage 31 to be slower, asthe position in the stage-radius rs direction of the bevel gear BG towhich the measurement light is irradiated is moved to the outercircumferential portion from the rotational center portion of the bevelgear BG. In other words, the velocity control section 54B controls therotational movement velocity of the stage 31 as follows. That is, in acase that the position of the bevel gear BG to which the measurementlight, is irradiated is the inner circumferential portion of the bevelgear BG, the rotational movement velocity is controlled to be high; andin a case that the position of the bevel gear BG to which themeasurement light is irradiated is the outer circumferential portion ofthe bevel gear BG, the rotational movement velocity is controlled to below.

The coordinate calculation section 53 (measurement section) calculatesthe profile data of the surface of the object 3, namelythree-dimensional profile data, based on the profile of the surface ofthe object 3 detected by the optical probe 20A. In other words, thecoordinate calculation section 53 (measurement section) measures theprofile of the surface from the image taken by the imaging section 22,based on the position at which the measurement light is detected on theimaging plane of the imaging section 22. The coordinate calculationsection 53 receives the image information which is supplied from theinterval adjustment section 52 and in which the frame is thinned out.The coordinate calculation section 53 receives the coordinateinformation and the imaging direction of the optical probe 20A and therotation position information of the stage 31 those of which aresupplied from the coordinate detection section 51. The coordinatecalculation section 53 calculates the point group data of the coordinatevalues (three-dimensional coordinate values) of each of the measurementpoints based on the image information supplied from the intervaladjustment section 52, the coordinate information and the imagingdirection of the optical probe 20A, and the rotation positioninformation of the stage 31.

For example, in the case that the profile of the gear as the object 3 ismeasured, the coordinate calculation section 53 (measurement section)measures the profile of the tooth based on the position of themeasurement light in the image taken by the imaging section 22.

The calculation method will be specifically explained below. At first,the coordinate calculation section 53 calculates, based on thecoordinates of the optical probe 20A received, the coordinates of theirradiation section 21 fixed to the optical probe 20A and thecoordinates of the imaging section 22 fixed to the optical probe 20A.Here, since the irradiation section 21 is fixed to the optical probe20A, the irradiation angle of the irradiation section 21 is fixed to theoptical probe 20A. Further, since the imaging section 22 is also fixedto the optical probe 20A, the imaging angle of the imaging section 22 isfixed to the optical probe 20A.

The coordinate calculation section 53 calculates the coordinates of thepoint at which the light is irradiated to the object 3 by usingtriangulation for each pixel of the image taken by the imaging section22. The coordinate of the point at which the light is irradiated to theobject 3 is the coordinate of an intersection point between a straightline extending from the coordinate of the irradiation section 21 in adirection of the irradiation angle of the irradiation section 21 and astraight line (optical axis) extending from the coordinate of theimaging section 22 in a direction of the imaging angle of the imagingsection 22. The image taken by the imaging section 22 indicates theimage detected by the optical probe 20A which is arranged at themeasurement position. Accordingly, the coordinate calculation section 53(measurement section) measures the profile of the surface based on theposition of the measurement light in the image taken by the imagingsection 22.

The object 3 is supported by the stage 31. By rotating the stage 31around the rotational axis θ by the support table 32, the object 3rotates, together with the stage 31, with the rotational axis θ of thestage 31 as the rotational center. Further, by rotating the stage 31around the rotational axis φ, the object 3 rotates, together with thestage 31, with the rotational axis φ of the stage 31 as the rotationalcenter. In other words, the coordinates of the position to which thecalculated light is irradiated correspond to information indicating theposition of the surface of the object 3, the posture of which isinclined by rotating the stage 31 around the rotational axis θ and therotational axis φ. Accordingly, the coordinate calculation section 53calculates the coordinates of the position to which the light isirradiated by correcting the incline of the stage 31, namely based onthe rotation position information around the rotational axis θ and therotational axis φ, and thereby the coordinate calculation section 53calculates profile data of the surface of the actual object 3. Further,the coordinate calculation section 53 makes the storage section 55 storethe point group data of the three-dimensional coordinate values, whichis the profile data of the surface of the object 3 calculated, therein.

The driving control section 54 outputs the driving signal to the headdriving section 14 and the stage driving section (movement section)based on the command signal from the movement command section 56 todrive and control the measurement head 13 and the stage 31.

The movement command section 56 reads, from the storage section 55, theinstruction information (namely, the type of the object 3) stored by theinput device 42. The movement command section 56 reads, from the storagesection 55, data and the like indicating coordinate values of themeasurement point which indicate a measurement range of the object 3associated with the type of the object 3 read from the storage section55, coordinate values of the position for starting the measurement(first measurement point) of the object 3, coordinate values of theposition for completing the measurement (last measurement point) of theobject 3, the movement direction of the measurement point, and thespacing distance between each measurement point (for example, ameasurement pitch of a constant distance). The movement command section56 send, to the position setting section 58, the data regarding the formor shape of the object 3 among the above data read from the storagesection 55. The position setting section 58 obtains the direction of theridge line (of the tooth) of the object 3 from the data regarding theshape or form of the object 3, and outputs the obtained data for thedirection of the ridge line of the object 3 to the movement commandsection 56. The movement command section 56 calculates the movementroute of scan with respect to the object 3 based on the read data fromthe storage section 55 and the obtained data for the direction of theridge line of the object 3. Then, the movement command section 56supplies the command signal for driving the measurement head 13 and thestage 31 to the driving control section 54 in accordance with thecalculated movement route and the spacing distance of each measurementpoint (for example, the measurement pitch of the constant distance) andthe like read from the storage section 55; and drives the measurementhead 13 and the stage 31 by the head driving section 14 and the stagedriving section 33 (movement section).

For example, the movement command section 56 supplies command signalscommanding drive or stop of the movement of the object 3 and drive orstop of the rotation of the stage 31 in accordance with the movementroute and the measurement pitch, and thereby the relative positionbetween the optical probe 20A and the stage 31 is moved and stopped foreach measurement point. The movement command section 56 supplies thecommand signal to the interval adjustment section 52.

The data output section 57 reads the measurement data (coordinate valuesof all of the measurement points) and the like from the storage section55. The data output section 57 supplies the measurement data and thelike to the monitor 44. The data output section 57 outputs themeasurement data and the like to a design system (not shown) such as aprinter and/or a CAD system.

For example, the interval adjustment section 52 receives the imageinformation in which it is taken the image of the shadow pattern formedby the measurement light which is irradiated on the surface of theobject 3 by the optical probe 20A at the predetermined samplingfrequency. Eased on the image information, the coordinate calculationsection 53 calculates the coordinates of the point at which the light isirradiated to the object 3 (point on the shadow pattern) by using thetriangulation for each pixel of the taken image. The coordinatecalculation section 53 calculates the point group data of the coordinatevalues of the shadow pattern for every information of the image taken atthe predetermined sampling frequency.

Next, an explanation will be made about a case in which the profilemeasuring apparatus 100 of this embodiment measures the profile of thegear as the object 3. In particular, the explanation will be made byciting a case in which the profile of each of the spur gear SG, thehelical gear HG, the bevel gear BC, the spiral bevel gear SBG, and theworm gear WG is measured for each of the directions including theirradiation direction DR1, the imaging direction DR2, the movementdirection DR3, and the movement direction DR4.

<Measurement of Spur Gear>

As shown in FIGS. 3A and 3B, for example, the profile measuringapparatus 100 of this embodiment is capable of measuring the profile ofthe object 3 on the assumption that the spur gear SG is the object 3.FIGS. 3A and 3B are configuration diagrams each showing the constructionof the profile measuring apparatus 100 which measures the profile of thespur gear SG. In a case that the profile measuring apparatus 100measures the profile of the spur gear SG, the spur gear SG as the object3 is, for example, placed on the stage 31 so that the center of therotational axis of the spur gear SG coincides with the center of therotational axis θ of the stage 31. That is, the stage driving section 33(movement section) moves and rotates the spur gear SG so that therotational axis of the spur gear SG coincides with the rotational axisof the rotational movement.

Here, as shown in FIG. 3A, the irradiation section 21 irradiates themeasurement light to the tooth plane of the spur gear SG in accordancewith the irradiation direction DR1 (first direction) which is determinedcorresponding to the normal direction of the tooth plane of the spurgear SG. In particular, the envelope plane of the top of each tooth isassumed, and the irradiation direction DR1 is a direction perpendicularto the envelope surface in the measurement area. In this case, theimaging section 22 takes the image of the measurement light from theimaging direction DR2 (second direction) which is determinedcorresponding to the direction of the ridge line of the tooth of thetooth plane (surface) of the spur gear SG to which the measurement lightis irradiated (direction different from the circumferential direction).That is, as shown in FIG. 3B, the imaging section 22 takes the image ofthe optical cutting line PCL from the direction of the ridge line of thetooth of the spur gear SG (namely the Z-axis direction) which issupposed to be the imaging direction DR2. In this case, as shown in FIG.3B, the movement control section 54A rotates the support table 32 in themovement direction DR3 with the rotational axis θ as the rotationalcenter. That is, the movement control section 54A moves the position ofthe object 3 to which the measurement light is irradiated relative tothe movement direction DR3 (third direction) of the detection section 20(holding section) which is determined corresponding to thecircumferential direction. Accordingly, the profile measuring apparatus100 measures the profile of the spur gear SG.

The profile measuring apparatus 100 of this embodiment includes themovement section 10 which moves the irradiation section 21 and theobject 3 relative to each other to move the position of the measurementarea to which the measurement light is irradiated in the movementdirection DR3 (third direction) corresponding to the circumferentialdirection. The imaging section 22 takes the image of the measurementarea, every time when the measurement area is displaced in the thirddirection, to generate a plurality of images. The coordinate calculationsection 53 (measurement section) measures a plurality of concave-convexshapes based on the images. The movement section 10 moves theirradiation section 21 and the object 3 relative to each other also inthe movement direction DR4 (fourth direction) which is determinedcorresponding to the extending direction of the concave-convex shape. Inparticular, the profile measuring apparatus 100 successively moves themeasurement area in the direction of the ridge line of the tooth (forexample, the axis direction of the rotational axis θ in FIG. 3A) whilemoving the measurement area in the arrangement direction of the teeth ofthe spur gear SG (for example, the rotation direction of the rotationalaxis θ in FIG. 3A). For example, the profile measuring apparatus 100rotates the spur gear SG in the rotation direction of the rotationalaxis θ (for example, the movement direction DR3 (third direction) inFIG. 3B) to move the measurement area so that each tooth becomes themeasurement area. Along with this, the profile measuring apparatus 100moves the irradiation section 21 and the imaging section 22 in the axisdirection of the rotational axis θ of the spur gear SG (for example, themovement direction DR4 (fourth direction) in FIG. 3B) to move themeasurement area so that each position on the tooth plane becomes themeasurement area. As described above, the profile measuring apparatus100 of this embodiment is capable of successively measuring the profileof each tooth of the spur gear SG. Accordingly, the profile measuringapparatus 100 of this embodiment is capable of improving velocity formeasuring the profile of the tooth plane of the gear.

In this situation, the irradiation section 21 irradiates the measurementlight in accordance with the irradiation direction DR1 (first direction)which is the irradiation direction of the measurement light in which theline (optical cutting line PCL) is formed on the most convex portion andthe most concave portion of the concave-convex shape of the object 3.That is, the irradiation section 21 irradiates the measurement light inaccordance with the irradiation direction DR1 in which the opticalcutting line PCL is formed on the top of the tooth and the bottom of thetooth of the gear as the object 3. Accordingly, the profile measuringapparatus 100 is capable of improving the velocity for measuring theprofile of the tooth plane of the gear.

As described above, the imaging section 22 generates a plurality ofimages each taken depending on the length of the concave-convex shape ofthe surface of the object 3 in the circumferential direction and thelength of the measurement light which is irradiated on the surface andis taken by the imaging section 22. The coordinate calculation section53 (measurement section) measures the plurality of concave-convex shapesbased on the images taken by the imaging section 22. Here, in the casethat the object 3 is the gear, the dimension of the concave-convex shapeof the object 3 in the circumferential direction of the gear (namely,the dimension of each tooth of the gear) corresponds to a direction ofthe thickness of the tooth (a tooth-thickness direction) of the gear.Further, the length of the measurement light which is irradiated on thesurface and is taken by the imaging section 22 is, for example, a lengthof the optical cutting line PCL which is taken by the imaging section 22in the length of the optical cutting line PCL formed on the surface ofthe object 3 as viewed from the imaging direction DR2. That is, in thecase that the object 3 is the gear, the imaging section 22 generates theplurality of images each taken depending on the length of the toothwidth of the tooth and the length of the measurement light which isirradiated on the tooth plane and is taken by the imaging section 22.That is, the imaging section 22 generates the plurality of images bytaking images of the teeth of the gear respectively. In this case, thecoordinate calculation section 53 (measurement section) measuresprofiles of the teeth based on the plurality of images.

The irradiation section 21 can irradiate the measurement light so that adirection intersecting with the circumferential direction of the object3 is the direction of the optical cutting line PCL (line). That is, theirradiation section 21 can irradiate the measurement light, for example,so that the optical cutting line PCL is formed to be inclined to thedirection of the ridge line of the tooth from the circumferentialdirection of the spur gear SG. In a case that any one of left and rightsurfaces with respect to the ridge line of the tooth is expected to bemeasured, the measurement light can be set to be substantiallyperpendicular to the surface of the tooth to be measured.

The profile measuring apparatus 100 of this embodiment can include themovement section 10, which moves the irradiation section 21 and theobject 3 relative to each other, so that the position of the measurementarea to which the illumination light is irradiated is moved in themovement direction DR3 (third direction) corresponding to thecircumferential direction. The imaging section 22 takes the image of theobject every time when the measurement area is displaced in the thirddirection to generate a plurality of images. The coordinate calculationsection 53 (measurement section) can measure the plurality ofconcave-convex shapes based on the images generated by the imagingsection 22. The movement section 10 can move the irradiation section 21and the object 3 relative to each other also in the movement directionDR4 (fourth direction) which is determined corresponding to theextending direction of the concave-convex shape. As described above, theprofile measuring apparatus 100 of this embodiment is capable ofsuccessively measuring the profile of each tooth of the spur gear SG.Accordingly, the profile measuring apparatus 100 of this embodiment iscapable of improving the velocity for measuring the profile of the toothplane of the gear.

The movement section 10 provided for the profile measuring apparatus 100of this embodiment can be controlled by the movement control section54A. In a case that one rotation is supposed to be 1 in the angledisplacement amount in the movement direction DR3 (third direction) andthat the dimension of the measurement area to which the measurementlight is irradiated in the direction in which the concave-convex shapeextends in the movement direction DR4 (fourth direction) is supposed tobe 1, the movement control section 54A can perform control so that aratio of the movement amount in the movement direction DR4 (fourthdirection) with respect to the angle displacement amount in the movementdirection DR3 (third direction) has a value greater than 1. For example,in a case that it is normalized so that one rotation around therotational axis θ is 1 in the angle displacement amount in the movementdirection DR3 (third direction) and that it is normalized so that thedimension of the measurement area to which the measurement light isirradiated is 1 in the direction in which the concave-convex shapeextends in the movement direction DR4 (fourth direction) the movementcontrol section 54A can perform control so that the ratio of themovement amount in the movement direction DR4 (fourth direction) withrespect to the angle displacement amount in the movement direction DR3(third direction) has a value greater than 1. Accordingly, the profilemeasuring apparatus 100 of this embodiment is capable of moving themeasurement area in the radial direction of the rotational axis θ forevery one rotation around the rotational axis θ, and thus the profilemeasuring apparatus 100 is capable of measuring the profile of theobject 3 without overlap of each measurement area. That is, the profilemeasuring apparatus 100 of this embodiment is capable of improving thevelocity for measuring the concave-convex shape (for example, theprofile of the tooth plane of the gear).

In this case, the movement control section 54A provided for the profilemeasuring apparatus 100 of this embodiment can move the movement section10 in the direction in which the concave-convex shape extends in themovement direction DR4 (fourth direction) by a consecutive movementamount depending on the angle displacement amount in the movementdirection DR3 (third direction). The movement control section 54Aprovided for the profile measuring apparatus 100 of this embodiment canmove the movement section 10 in the direction in which theconcave-convex shape extends in the movement direction DR4 (fourthdirection) by a stepwise movement amount depending on the angledisplacement amount in the movement direction DR3 (third direction) (forexample, a movement amount which increases in a stepwise manner forevery one rotation around the rotational axis θ in the angledisplacement amount in the movement direction DR3 (third direction)).The movement control section 54A provided for the profile measuringapparatus 100 of this embodiment can move the movement section 10 in thedirection in which the concave-convex shape extends in the movementdirection DR4 (fourth direction) by another stepwise movement amountdepending on the angle displacement amount in the movement direction DR3(third direction) (for example, a movement amount which increases in astepwise manner for every displacement by a predetermined angle aroundthe rotational axis θ in the angle displacement amount in the movementdirection DR3 (third direction)).

<Measurement of Helical Gear>

For example, as shown in FIGS. 4A and 4B, the profile measuringapparatus 100 of this embodiment is capable of measuring the profile ofthe object 3 on the assumption that the helical gear HG is the object 3.FIGS. 4A and 4B are diagrams each showing the construction of theprofile measuring apparatus 100 which measures the profile of thehelical gear HG. In a case that the profile measuring apparatus 100measures the profile of the helical gear HG, the helical gear HG as theobject 3 is, for example, placed on the stage 31 so that the center ofthe rotational axis of the helical gear HG coincides with the center ofthe rotational axis θ of the stage 31. That is, the stage drivingsection 33 (movement section) moves and rotates the helical gear HG sothat the rotational axis of the helical gear HG coincides with therotational axis θ of the rotational movement.

In the case that the helical gear HG is measured, the profile measuringapparatus 100 set each direction as in a similar manner as in the caseof the spur gear SG. For example, as shown in FIG. 4A, the irradiationsection 21 irradiates the measurement light to the tooth plane of thehelical gear HG in accordance with the irradiation direction DR1 (firstdirection) which is determined corresponding to the normal direction ofthe tooth plane of the helical gear HG. In this case, the imagingsection 22 takes the image of the measurement light from the imagingdirection DR2 (second direction) which is determined corresponding tothe ridge line of the tooth direction of the tooth plane (surface) ofthe helical gear HG to which the measurement light is irradiated(direction different from the circumferential direction). That is, asshown in FIG. 4B, the imaging section 22 takes the image of the opticalcutting line PCL from the direction of the ridge line of the tooth ofthe helical gear HG which is supposed to be the imaging direction DR2.In this case, as shown in FIG. 4B, the movement control section 54Arotates the support table 32 in the movement direction DR3 with therotational axis θ as the rotational center. That is, the movementcontrol section 54A moves the position of the object 3 to which themeasurement light is irradiated relative to the movement direction DR3(third direction) of the detection section 20 (holding section) which isdetermined corresponding to the circumferential direction. Accordingly,the profile measuring apparatus 100 measures the profile of the helicalgear HG.

The profile measuring apparatus 100 successively moves the measurementarea in the direction of the ridge line of the tooth (for example, theaxis direction of the rotational axis θ in FIG. 4A) while moving themeasurement area in the arrangement direction of the teeth of thehelical gear HG (for example, the rotation direction of the rotationalaxis θ in FIG. 4A). For example, the profile measuring apparatus 100rotates the helical gear HG in the rotation direction of the rotationalaxis θ (for example, the movement direction DR3 (third direction) inFIG. 4B) to move the measurement area so that each tooth becomes themeasurement area. Along with this, the profile measuring apparatus 100moves the irradiation section 21 and the imaging section 22 in the axisdirection of the rotational axis θ of the helical gear HG (for example,the movement direction DR4 (fourth direction) in FIG. 4B) to move themeasurement area so that each position on the tooth plane can beincluded in the measurement area. As described above, the profilemeasuring apparatus 100 of this embodiment is capable of successivelymeasuring the profile of each tooth of the helical gear HG. Accordingly,the profile measuring apparatus 100 of this embodiment is capable ofimproving the velocity for measuring the profile of the tooth plane ofthe gear.

<Measurement of Bevel Gear>

For example, as shown in FIGS. 5A and 5B, the profile measuringapparatus 100 of this embodiment is capable of measuring the profile ofthe object 3 on the assumption that the bevel gear BG is the object 3.FIGS. 5A and 5B are diagrams each showing the construction of theprofile measuring apparatus 100 which measures the profile of the bevelgear BG. In a case that the profile measuring apparatus 100 measures theprofile of the bevel gear BG, the bevel gear BG as the object 3 is, forexample, placed on the stage 31 so that the center of the rotationalaxis of the bevel gear BG coincides with the center of the rotationalaxis θ of the stage 31. That is, the stage driving section 33 (movementsection) moves and rotates the bevel gear BG so that the rotational axisof the bevel gear BG coincides with the rotational axis θ of therotational movement.

As shown in FIG. 5A, the irradiation section 21 irradiates themeasurement light to the tooth plane of the bevel gear BG in accordancewith the irradiation direction DR1 (first direction) which is determinedcorresponding to the normal direction of the tooth plane of the bevelgear BG. In this case, the imaging section 22 takes the image of themeasurement light from the imaging direction DR2 (second direction)which is determined corresponding to the direction of the ridge line ofthe tooth of the tooth plane (surface) of the bevel gear BG to which themeasurement light is irradiated (direction different from thecircumferential direction). That is, as shown in FIG. 5B, the imagingsection 22 takes the image of the optical cutting line PCL from thedirection of the ridge line of the tooth of the bevel gear BG which issupposed to be the imaging direction DR2. In this case, as shown in FIG.5B, the movement control section 54A rotates the support table 32 in themovement direction DR3 with the rotational axis θ as the rotationalcenter. That is, the movement control section 54A relatively moves theposition of the object 3 to which the measurement light is irradiated inthe movement direction DR3 (third direction) of the detection section 20(holding section) which is determined corresponding to thecircumferential direction. Accordingly, the profile measuring apparatus100 measures the profile of the bevel gear BG.

The profile measuring apparatus 100 successively moves the measurementarea in the direction of the ridge line of the tooth (for example, adirection intersecting with the axis direction of the rotational axis θin FIG. 5A) while moving the measurement area in the arrangementdirection of the teeth of the bevel gear BG (for example, the rotationdirection of the rotational axis θ in FIG. 5A). For example, the profilemeasuring apparatus 100 rotates the bevel gear BG in the rotationdirection of the rotational axis θ (for example, the movement directionDR3 (third direction) in FIG. 5B) to move the measurement area so thateach tooth becomes the measurement area. Along with this, the profilemeasuring apparatus 100 moves the irradiation section 21 and the imagingsection 22 in the direction intersecting with the axis direction of therotational axis θ of the bevel gear BG (for example, the movementdirection DR4 (fourth direction) in FIG. 5B) to move the measurementarea so that each position on the tooth plane is included in themeasurement area. As described above, the profile measuring apparatus100 of this embodiment is capable of successively measuring the profileof each tooth of the bevel gear BG. Accordingly, the profile measuringapparatus 100 of this embodiment is capable of improving the velocityfor measuring the profile of the tooth plane of the gear.

<Measurement of Spiral Bevel Gear>

For example, as shown in FIGS. 6A and 6B, the profile measuringapparatus 100 of this embodiment is capable of measuring the profile ofthe object 3 on the assumption that the spiral bevel gear SBG is theobject 3. FIGS. 6A and 6B are diagrams each showing the construction ofthe profile measuring apparatus 100 which measures the profile of thespiral bevel gear SBG. In a case that the profile measuring apparatus100 measures the profile of the spiral bevel gear SBG, the spiral bevelgear SBG as the object 3 is, for example, placed on the stage 31 so thatthe center of the rotational axis of the spiral bevel gear SBG coincideswith the center of the rotational axis θ of the stage 31. That is, thestage driving section 33 (movement section) rotates the spiral bevelgear SBG so that the rotational axis of the spiral bevel gear SBGcoincides with the rotational axis θ of the rotational movement.

As shown in FIG. 6A, the irradiation section 21 irradiates themeasurement light to the tooth plane of the spiral bevel gear SBG inaccordance with the irradiation direction DR1 (first direction) which isdetermined corresponding to the normal direction of the tooth plane ofthe spiral bevel gear SBG. In this case, the imaging section 22 takesthe image of the measurement light from the imaging direction DR2(second direction) which is determined corresponding to the direction ofthe ridge line of the tooth of the tooth plane (surface) of the spiralbevel gear SBG to which the measurement light is irradiated (directiondifferent from the circumferential direction). That is, as shown in FIG.6B, the imaging section 22 takes the image of the optical cutting linePCL from the direction of the ridge line of the tooth of the spiralbevel gear SBG which is supposed to be the imaging direction DR2. Notedthat the direction of the ridge line of the tooth of the spiral bevelgear SBG changes depending on the position in the radial direction ofthe spiral bevel gear SBG, and thus the orientation of the optical probe20A is changed by the head rotation mechanism 13 a based on whichposition, among the positions of the spiral bevel gear SBG in the radialdirection, corresponds to the measurement area. Accordingly, it ispossible to change the imaging direction of the linear projectionpattern. In this case, as shown in FIG. 6B, the movement control section54A rotates the support table 32 in the movement direction DR3 with therotational axis θ as the rotational center. That is, the movementcontrol section 54A relatively moves the position of the object 3 towhich the measurement light is irradiated in the movement direction DR3(third direction) of the detection section 20 (holding section) which isdetermined corresponding to the circumferential direction. Accordingly,the profile measuring apparatus 100 measures the profile of the spiralbevel gear SBG.

The profile measuring apparatus 100 successively moves the measurementarea in the direction of the ridge line of the tooth (for example, adirection which is torsional about the axis direction of the rotationalaxis θ in FIG. 6A) while moving the measurement area in the arrangementdirection of the teeth of the spiral bevel gear SBG (for example, therotation direction of the rotational axis θ in FIG. 6A). For example,the profile measuring apparatus 100 rotates the spiral bevel gear SBG inthe rotation direction of the rotational axis θ (for example, themovement direction DR3 (third direction) in FIG. 6B) to move themeasurement area so that each tooth is included in the measurement area.Along with this, the profile measuring apparatus 100 moves theirradiation section 21 and the imaging section 22 in the direction whichis torsional about the axis direction of the rotational axis θ of thespiral bevel gear SBG (for example, the movement direction DR4 (fourthdirection) in FIG. 6E) to move the measurement area so that eachposition on the tooth plane is included in the measurement area. Asdescribed above, the profile measuring apparatus 100 of this embodimentis capable of successively measuring the profile of each tooth of thespiral bevel gear SBG. Accordingly, the profile measuring apparatus 100of this embodiment is capable of improving the velocity for measuringthe profile of the tooth plane of the gear.

<Measurement of Worm Gear>

For example, as shown in FIGS. 7A and 7B, the profile measuringapparatus 100 of this embodiment is capable of measuring the profile ofthe object 3 on the assumption that the worm gear WG is the object 3.FIGS. 7A and 7B are diagrams each showing the construction of theprofile measuring apparatus 100 which measures the profile of the wormgear WG. In a case that the profile measuring apparatus 100 measures theprofile of the worm gear WG, the worm gear WG as the object 3 is, forexample, placed on the stage 31 so that the center of the rotationalaxis of the worm gear WG coincides with the center of the rotationalaxis θ of the stage 31. That is, the stage driving section 33 (movementsection) rotates the worm gear WG so that the rotational axis of theworm gear WG coincides with the rotational axis θ of the rotationalmovement. Note that the irradiation section 21 and the imaging section22 are rotatable around z axis (rotatable in θ z direction) by arotation mechanism (not shown) while maintaining their relativeposition.

As shown in FIG. 7A, the irradiation section 21 irradiates themeasurement light to the tooth plane of the worm gear WG in accordancewith the irradiation direction DR1 (first direction) which is determinedcorresponding to the normal direction of the tooth plane of the wormgear WG, in particular, the envelope plane of the top of each tooth isassumed, and the irradiation direction DR1 is a direction perpendicularto the envelope surface in the measurement area. In this case, theimaging section 22 takes the image of the measurement light from theimaging direction DR2 (second direction) which is determinedcorresponding to the ridge line of the tooth direction of the toothplane (surface) of the worm gear WG to which the measurement light isirradiated (direction different from the circumferential direction).That is, as shown in FIG. 7B, the imaging section 22 takes the image ofthe optical cutting line PCL from the ridge line of the tooth directionof the worm gear WG which is supposed to be the imaging direction DR2.In this case, as shown in FIG. 7A, the movement control section 54Arotates the support table 32 in the movement direction DR3 with therotational axis θ as the rotational center. That is, the movementcontrol section 54A relatively moves the position of the object 3 towhich the measurement light is irradiated in the movement direction DR3(third direction) of the detection section 20 (holding section) which isdetermined corresponding to the circumferential direction. As describedabove, the profile measuring apparatus 100 measures the profile of theworm gear WG. In a case that any one of left and right surfaces withrespect to the ridge line of the tooth is expected to be measured, themeasurement light can be set to be substantially perpendicular to thesurface of the tooth to be measured.

The profile measuring apparatus 100 successively moves the measurementarea in the direction of the ridge line of the tooth (for example, arotation direction of the rotational axis θ in FIG. 7A) while moving themeasurement area in the arrangement direction of the teeth of the wormgear WG (for example, the axis direction of the rotational axis θ inFIG. 7A). For example, the profile measuring apparatus 100 rotates theworm gear WG in the rotation direction of the rotational axis θ (forexample, the movement direction DR3 (third direction) in FIG. 7B) tomove the measurement area so that each position on the tooth plane isincluded in the measurement area. Along with this, the profile measuringapparatus 100 moves the irradiation section 21 and the imaging section22 in the axis direction of the rotational axis θ of the worm gear WG(for example, the movement direction DR4 (fourth direction) in FIG. 7B)to move the measurement area so that each tooth is included in themeasurement area. As described above, the profile measuring apparatus100 of this embodiment is capable of successively measuring the profileof each tooth of the worm gear WG. Accordingly, the profile measuringapparatus 100 of this embodiment is capable of improving the velocityfor measuring the profile of the tooth plane of the gear.

Next, an explanation will be made about a process in which the profilemeasuring apparatus 100 executes the profile measurement of the object 3with reference to the flowchart, shown in FIG. 8. FIG. 8 is a flowchartshowing an example of a profile measurement process in this embodiment.

At first, the user sets a position for starting the measurement of theobject 3 (first measurement point) and a position for completing themeasurement (last measurement point) by inputting them through the inputdevice 42. The input device 42 makes the storage section 55 store theposition for starting the measurement (first measurement point) and theposition for completing the measurement (last measurement point), thoseof which are inputted through the input device 42, therein (step S1).Further, the spacing distance between each measurement point of theobject 3 is inputted and set through the input device 42 by the user.The input device 42 makes the storage section 55 store the spacingdistance between each measurement point inputted therefrom (step S2).Next, the projection direction and the imaging direction of themeasurement light, are set based on element data of the gear at themeasurement point of the object 3. In particular, the projectiondirection is set according to the direction of the tooth plane of thegear; and the imaging direction is set in the direction of the ridgeline of the tooth of the gear. As described above, the direction of theridge line of the tooth of the gear is obtained by the position settingsection 58 and the obtained data is send to the movement command section56. The movement command section 56 reads coordinate values of theposition for starting the measurement (first measurement point) and theposition for completing the measurement (last measurement point) anddata indicating the spacing distance between each measurement point (forexample, the measurement pitch of the certain spacing distance), thoseof which are pieces of information set after being inputted from thestorage section 55, coordinate values of the measurement pointindicating the measurement range which is preset information, themovement direction of the measurement point, and the like. The movementcommand section 56 calculates the movement route of scan with respect tothe object 3 based on the read data and the obtained data from theposition setting section 58 (step S3).

Next, the movement command section 56 supplies the command signal fordriving the measurement head 13 and the stage 31 to the driving commandsection 54 based on the calculated movement route to drive themeasurement head 13 and the stage 31 by the head driving section 14 andthe stage driving section 33 (movement section). Accordingly, themovement command section 56 moves the optical probe 20A to the positionfor starting the measurement of the object 3 (first measurement point)by moving the relative position between the measurement head 13 and thestage 31 (step S4).

Next, the interval adjustment section 52 detects the profile of thesurface of the object 3 via the optical probe 20A to supply the detectedimage information to the coordinate calculation section 53. Thecoordinate detection section 51 detects the coordinate information ofthe optical probe 20A and the rotation position information of the stage31 by the position detection section 17 to supply the detectedinformation to the coordinate calculation section 53 (step S6).

The coordinate calculate section 53 calculates the point group data ofthe coordinate values (three-dimensional coordinate values) of themeasurement point based on the coordinate information of the opticalprobe 20A and the rotation position information of the stage 31, thoseof which are supplied from the coordinate detection section 51, and theimage information supplied from the interval adjustment section 52 tostore the point group data in the storage section 55 (step S7).

Next, the movement command section 56 judges as to whether or not themeasurement point measured most recently is the position for completingthe measurement (last measurement point) (step S8). In the step S8, in acase that it is judged that the measurement point measured most recentlyis not the position for completing the measurement (last measurementpoint), the movement command section 56 moves the optical probe 20A tothe next measurement point and then stops the optical probe 20A. Forexample, in order to move the optical probe 20A to the next measurementpoint in accordance with the movement route, the movement commandsection 56 supplies the command signal for driving the measurement head13 and the stage 31 to the driving control section 54 to drive themeasurement head 13 and the stage 31 by the head driving section 14 andthe stage driving section 33 (movement section) (step S9). Then, theprocess returns to the step S6 by the movement, command section 56.

On the other hand, in the step S8, in a case that it is judged that themeasurement point measured most recently is the position for completingthe measurement (last measurement point), the coordinate calculatesection 53 calculates the profile data of the surface of the object 3based on the point group data of the coordinate values(three-dimensional coordinate values) calculated in each measurementpoint. For example, the coordinate calculation section 53 reads, fromthe storage section 55, the point group data of the coordinate values(three-dimensional coordinate values) calculated for each measurementpoint based on the image information detected by the optical probe 20Avia the interval adjustment section 52 and the coordinate information ofthe optical probe 20A and the rotation position information of the stage31 detected by the coordinate detection section 51; and calculates thepoint group data of the three-dimensional coordinate values as theprofile data of the surface of the object 3 to store the point groupdata in the storage section 55 (step S10).

As described above, the profile measuring apparatus 100 of thisembodiment includes the irradiation section 21 which irradiates themeasurement light which has the light amount distribution depending onthe surface of the object 3 having concave-convex shape, which isperiodically aligned in the circumferential direction and extends in thedirection different from the circumferential direction, to the surfaceof the object 3, in accordance with the irradiation direction DR1 (firstdirection) which is determined corresponding to the normal direction ofthe surface. The profile measuring apparatus 100 includes the imagingsection 22 which takes the image of the measurement light from theimaging direction DR2 (second direction), which is determinedcorresponding to the direction different from the circumferentialdirection in the surface to which the measurement light is irradiated,to generate the image. The profile measuring apparatus 100 includes thecoordinate calculation section 53 (measurement section) which measuresthe profile of the surface based on the position of the measurementlight in the image taken by the imaging section 22. Accordingly, theprofile measuring apparatus 100 is capable of setting accuracy formeasuring the profile of the surface of the object 3 depending onresolution of the imaging section 22 which takes the image of themeasurement light. That is, the profile measuring apparatus 100 of thisembodiment can accurately measure the profile of the surface of theobject 3.

As shown in FIG. 9, in a case that the profile of the object 3 ismeasured, the measurement light which has the light amount distributiondepending on the surface of the object 3 having concave-convex shape isirradiated to the surface of the object 3, in accordance with theirradiation direction DR1 (first direction) which is determinedcorresponding to the normal direction of the surface, wherein theconcave-convex shape of the object 3 is periodically aligned in thecircumferential direction and extends in the direction different fromthe circumferential direction (step SS1). The image of the measurementlight from the imaging direction DR2 (second direction) is taken togenerate the image, wherein the imaging direction DR2 is determinedcorresponding to the direction different from the circumferentialdirection in the surface to which the measurement light is irradiated(step SS2). The profile of the surface is obtained based on the positionof the measurement light in the taken image taken (step SS3).

The profile measuring apparatus 100 of this embodiment includes thestage driving section 33 (movement section) which relatively moves theposition of the object 3 to which the measurement light is irradiated inthe movement direction DR3 (third direction) of the detection section 20(holding section) which is determined corresponding to thecircumferential direction. The imaging section 22 generates theplurality of images each taken depending on the length of theconcave-convex shape in the circumferential direction and the length ofthe measurement light which is irradiated on the surface and is taken bythe imaging section 22. The coordinate calculation section 53(measurement section) measures the plurality of concave-convex shapesbased on the images taken by the imaging section 22. Accordingly, theprofile measuring apparatus 100 of this embodiment can consecutivelymeasure the profile of the surface of each of the concave-convex shapes(for example, teeth of the gear). That is, the profile measuringapparatus 100 of this embodiment is capable of shortening the time formeasuring the profile of the surface of the object 3.

The profile measuring apparatus 100 of this embodiment also includes thedetection section 20 (holding section) holding the irradiation section21 and the imaging section 22, and the stage driving section 33(movement section) moves the detection section 20 (holding section) withrespect to the object 3 in the movement direction DR3 (third direction)of the detection section 20 (holding section). Accordingly, the profilemeasuring apparatus 100 of this embodiment can consecutively measure theprofile of the surface of each of the concave-convex shapes (forexample, teeth of the gear). That is, the profile measuring apparatus100 of this embodiment is capable of shortening the time for measuringthe profile of the surface of the object 3.

The profile measuring apparatus 100 of this embodiment also includes themovement control section 54A which relatively rotates the object 3 inthe movement direction DR3 (third direction) of the detection section 20(holding section) to relatively move the position to which themeasurement light is irradiated in the movement direction DR3 (thirddirection) of the detection section 20 (holding section). Accordingly,the profile measuring apparatus 100 can measure the profile of thesurface of the object 3 having the concave-convex shape, which isperiodically aligned in the circumferential direction and extends in thedirection different from the circumferential direction, by performingcontinuous operation. That is, the profile measuring apparatus 100 ofthis embodiment is capable of shortening the time for measuring theprofile of the surface of the object 3.

The profile measuring apparatus 100 of this embodiment also includes thevelocity control section 54B which controls the movement velocity formoving and rotating the object 3 relative to and depending on theposition in the stage-radius rs direction (radial direction) of therotational movement of the object 3 to which the measurement light isirradiated. For example, the profile measuring apparatus 100 of thisembodiment measures the outer circumferential portion of the object 3 atrotation velocity slower than that of when the inner circumferentialportion of the object 3 is measured. Accordingly, the profile measuringapparatus 100 can perform the measurement such that density ofmeasurement points in the inner circumferential portion and density ofmeasurement points in the outer circumferential portion, of the object 3which has the surface having the concave-convex shape which isperiodically aligned in the circumferential direction and extends in thedirection different from the circumferential direction, are uniformized.

The stage driving section 33 (movement section) of the profile measuringapparatus 100 of this embodiment rotates the object 3 so that thecentral axis AX of the object 3 coincides with the rotational axis θ ofthe rotational movement. Accordingly, the profile measuring apparatus100 can shorten a movement distance in a case that the position to whichthe measurement light is irradiated is relatively moved in the movementdirection DR3 (third direction) of the detection section 20 (holdingsection). That is, the profile measuring apparatus 100 can stably movethe position to which the measurement light is irradiated.

The profile measuring apparatus 100 of this embodiment includes thestorage section 55 in which the position in the extending direction ofthe concave-convex shape is associated with information, which indicatesthe extending direction of the concave-convex shape for each position inthe extending direction of the concave-convex shape, and the associationis stored in advance. Accordingly, the profile measuring apparatus 100is capable of automatizing operation for relatively moving the positionof the object 3 to which the measurement light is irradiated in themovement direction DR3 (third direction). That is, the profile measuringapparatus 100 of this embodiment can reduce the burden to an operatorperforming measurement operation of the profile of the surface of theobject 3.

The measurement light of the profile measuring apparatus 100 of thisembodiment has the light amount distribution which is formed in the lineform in a case that the measurement light is irradiated to thehorizontal plane. Accordingly, the profile measuring apparatus 100 iscapable of measuring profiles of a plurality of portions of the object3, which are continuously formed, at the same time. That is, the profilemeasuring apparatus 100 can shorten the time for measuring the profileof the surface of the object 3.

The irradiation section 21 of the profile measuring apparatus 100 ofthis embodiment irradiates the measurement light so that the directionintersecting with the circumferential direction of the object 3 issupposed to be the direction of the line (optical cutting line PCL).Accordingly, the imaging section 22 is capable of taking the image ofthe measurement light including more information with respect to theprofile of the surface of the object 3 as compared with a case in whichthe optical cutting line PCL is not inclined. That is, the profilemeasuring apparatus 100 can measure the profile of the object 3 in aperiod of time shorter than the case in which the optical cutting linePCL is not inclined.

The irradiation direction DR1 (first direction) of the profile measuringapparatus 100 of this embodiment is an irradiation direction of themeasurement light, in which the line is formed on the most convexportion and the most concave portion of the concave-convex shape of theobject 3. The profile measuring apparatus 100 is capable of measuringthe profiles of the plurality of portions of the object 3, which arecontinuously formed, at the same time. That is, the profile measuringapparatus 100 can shorten the time for measuring the profile of thesurface of the object 3.

The profile measuring apparatus 100 of this embodiment includes theirradiation section 21 which irradiates the measurement light, which hasthe light amount distribution depending on the profile of the surface ofeach tooth of the gear as the object 3, to the tooth plane in accordancewith the irradiation direction DR1 (first direction) which is determinedcorresponding to the normal direction of the tooth plane of each tooth.The profile measuring apparatus 100 of this embodiment includes theimaging section 22 which takes the image of the optical cutting linefrom the imaging direction DR2 (second direction), which is determinedcorresponding to the direction of ridge line of the tooth of the toothplane to which the measurement light is irradiated, to generate theimage. The profile measuring apparatus 100 of this embodiment includesthe coordinate calculation section 53 (measurement section) whichmeasures the profile of the tooth based on the position of themeasurement light in the image taken by the imaging section 22.Accordingly, the profile measuring apparatus 100 is capable of settingaccuracy for measuring the profile of the surface of the gear (includingany gear such as the turbine) as the object 3 depending on theresolution of the imaging section 22 which takes the image of themeasurement light. That is, the profile measuring apparatus 100 of thisembodiment can accurately measure the profile of the surface of theobject 3

The profile measuring apparatus 100 of this embodiment includes thestage driving section 33 (movement section) which relatively moves theposition of the object 3 to which the measurement light is irradiated inthe movement direction DR3 (third direction) of the detection section 20(holding section) which is determined corresponding to the direction ofthe tooth width of the tooth. The imaging section 22 generates theplurality of images each taken depending on the length of the toothwidth of the tooth and the length of the measurement light which isirradiated on the tooth plane and is taken by the imaging section 22.The coordinate calculation section 53 (measurement section) measuresprofiles of the teeth of the gear based on the plurality of images.Accordingly, the profile measuring apparatus 100 of this embodiment canconsecutively measure the profile of the surface of each of the teeth ofthe gear. That is, the profile measuring apparatus 100 of thisembodiment is capable of shortening the time for measuring the profileof the surface of the object 3.

The profile measuring apparatus 100 of this embodiment further includesthe movement control section 54A which relatively rotates the gear inthe movement direction DR3 (third direction) of the detection section 20(holding section) to move the position to which the measurement light isirradiated relative to the movement direction DR3 (third direction) ofthe detection section 20 (holding section). Accordingly, the profilemeasuring apparatus 100 can measure the profile of the surface of thegear as the object 3 by performing the continuous operation. That is,the profile measuring apparatus 100 of this embodiment is capable ofshortening the time for measuring the profile of the surface of theobject 3.

In the above embodiment, the construction in which the stage drivingsection 33 (movement section) moves the stage 31 is explained. However,the construction is not limited thereto. For example, the profilemeasuring apparatus 100 can move the detection section 20 (holdingsection) with respect to the object 3 in the movement direction DR3(third direction) of the detection section 20 (holding section). Thatis, the profile measuring apparatus 100 can be configured such that themovement section 10 moves the detection section 20 (holding section) inthe movement section DR3 (third direction). Accordingly, for example, ina case that the object 3 is heavy, it is possible to measure the profileof the surface of the object 3 without moving the object 3. In the aboveembodiment, a tilting mechanism adjusting a tilt angle is provided forthe stage 31 and thereby making it possible to adjust the projectiondirection of the measurement light depending on the surface of theobject 3 having the concave convex shape to be subjected to themeasurement. Further, the rotation mechanism which rotates the opticalprobe 20A with respect to the axis parallel to the Z-axis is providedand thereby making it possible that the imaging direction is along theextending direction of the concave-convex shape. However, the presentteaching is not limited thereto and the following configuration is alsoallowable. That is, there are provided a joint mechanism which tilts theoptical probe around the X-axis or the Y-axis and a rotation mechanismwhich rotates the optical probe between the joint mechanism and theoptical probe, and thereby making possible to take the image of theportion to which the measurement light is projected in a predetermineddirection while projecting the measurement light in the predetermineddirection. It is possible to configure that the irradiation section 21and the imaging section 22 are rotatable around at least one of x axis(rotatable in θx direction) y axis (rotatable in θy direction) and zaxis (rotatable in θz direction), while maintaining the relativeposition between the irradiation section 21 and the imaging section 22.

The irradiation direction DR1 (first direction) of the irradiationsection 21 can be inclined toward a height direction of the tooth ratherthan the direction connecting the edge portion and the valley portion ofthe concave-convex shape. For example, the irradiation direction DR1(first direction) can be a direction in which the measurement light isirradiated to the edge portion (for example, the most convex portion)and the valley portion (for example, the most concave portion) in theconcave-convex shape of the object 3. Accordingly, it is possible forthe profile measuring apparatus 100 to reduce that the measurement lightis blocked by the object 3, and thus it is possible to measure even theprofile of the valley portion (for example, the most concave portion) ofthe object 3.

The irradiation direction DR1 (first direction) of the irradiationsection 21 can be a direction which corresponds to the normal directionof the plane included in the measurement area. For example, theirradiation direction DR1 (first direction) can be a direction whichcoincides with the normal direction of the plane included in themeasurement area. Accordingly, the profile measuring apparatus 100 canreduce the line width on the measurement surface of the measurementlight which is irradiated in a line form with respect to the plane(measurement surface) included in the measurement area as compared witha case in which the measurement light is irradiated from a directionwhich does not correspond to the normal direction. The smaller the linewidth on the measurement surface of the measurement light is, the moreaccurately the profile of the object 3 can be measured. That is, theprofile measuring apparatus 100 is capable of improving the accuracy formeasuring the profile of the object 3.

<Second Embodiment>

Next, an explanation will be made about the second embodiment of thepresent teaching with reference to FIG. 10 and FIG. 11. An explanationof the structure (s) which is/are the same as that (those) of the firstembodiment will be omitted. FIG. 10 schematically shows an example ofthe configuration of the profile measuring apparatus 100 according tothis embodiment.

The driving section 16 provided for the profile measuring apparatus 100of this embodiment includes an irradiation driving section 14A. Theirradiation driving section 14A drives the irradiation section 21 sothat the irradiation section 21 is movable independently of the imagingsection 22. The irradiation driving section 14A of the profile measuringapparatus 100 of this embodiment is, for example, provided in thedetection section 20 (holding section) to drive the irradiation section21.

The position detection section 17 provided for the profile measuringapparatus 100 of this embodiment includes an irradiation-positiondetection section 15A. The irradiation-position detection section 15Aincludes an X-axis encoder, a Y-axis encoder, and a Z-axis encoder whichdetect positions of the X-axis, the Y-axis, and the Z-axis directions ofthe irradiation section 21, respectively. The irradiation-positiondetection section 15A detects the coordinates of the irradiation section21 by these encoders to supply the signals indicating the coordinatevalues of the irradiation section 21 to the coordinate detection section51 as will be described later. The irradiation-position detectionsection 15A of the profile measuring apparatus 100 of this embodiment isdisposed on, for example, the detection section 20 (holding section) todetect the position of the irradiation section 21. The coordinatecalculation section 53 (measurement section) of this embodimentcalculates the coordinates of the object 3 based on the position of theirradiation section 21 detected by the irradiation-position detectionsection 15A.

In the storage section 55 provided for the profile measuring apparatus100 of this embodiment, for each of the types of the objects 3, theposition in the extending direction of the concave-convex shape of theobject 3 is associated with information, which indicates the extendingdirection of the concave-convex shape for each position in the extendingdirection of the concave-convex shape, and the association is stored inadvance. In the storage section 55 of this embodiment, for example, foreach of the types of the gears, the position in the direction of theridge line of the tooth of the gear is associated with information,which indicates the direction of the ridge line of the tooth for eachposition in the direction of the ridge line of the tooth, and an theassociation is stored in advance.

The driving control section 54 provided for the profile measuringapparatus 100 of this embodiment includes an irradiation movementcontrol section 54C (second movement control section). The irradiationmovement control section 54C (second movement control section) readsinformation which indicates the extending direction of theconcave-convex shape associated with the present position in theextending direction of the concave-convex shape to which the measurementlight is irradiated, from among the pieces of information which indicatethe extending directions of the concave-convex shapes stored in thestorage section 55, as information which indicates the extendingdirection of the concave-convex shape corresponding to the movementdirection DR4 (fourth direction) at the position to which themeasurement light is irradiated. For example, in the case that theprofile of the gear is measured, the movement control section 54A ofthis embodiment reads information which indicates the direction of theridge line of the tooth associated with the present position in thedirection of the ridge line of the tooth to which the measurement lightis irradiated, from among pieces of information which indicate thedirection of the ridge line of the tooth of the gear stored in thestorage section 55, as information which indicates the directioncorresponding to the movement direction DR4 of the optical probe 20A.That is, the movement control section 54A of this embodiment reads, fromthe storage section 55, the movement direction DR4 of the optical probe20A based on the present position of the optical probe 20A detected bythe head position detection section 15.

Further, in this case, as shown in FIG. 11, an irradiation movementcontrol section 54C (second movement control section) moves the positionto which the measurement light is irradiated in the movement directionDR4 (fourth direction), of the position to which the measurement lightis irradiated, which is determined corresponding to the extendingdirection of the concave-convex shape. FIG. 11 is a configurationdiagram showing an example of a direction in which the position to whichthe measurement light is irradiated is moved by the irradiation movementcontrol section 54C (second movement control section). That is, theirradiation movement control section 54C (second movement controlsection) moves the irradiation section 21 in the direction of the ridgeline of the tooth of the helical gear HG to move the position to whichthe measurement light is irradiated.

As described above, the profile measuring apparatus 100 of thisembodiment is capable of moving the irradiation section 21 independentlyof the imaging section 22 to move the position to which the measurementlight is irradiated. Accordingly, the profile measuring apparatus 100 iscapable of measuring the profile while moving the position to which themeasurement light is irradiated depending on the profile of the surfaceof the object 3. That is, the profile measuring apparatus 100 canaccurately measure the profile of the object 3.

<Third Embodiment>

Next, as the third embodiment in the present teaching, an explanationwill made about a structure manufacturing system which includes any oneof the profile measuring apparatus 100 of the first embodiment and theprofile measuring apparatus 100 of the second embodiment. FIG. 12 is ablock configuration diagram of a structure manufacturing system 200. Thestructure manufacturing system 200 includes a profile measuringapparatus 100 as described in any of the above embodiments, a designapparatus 110, a shape forming apparatus 120, a controller (inspectionapparatus) 150, and a repair apparatus 140.

The design apparatus 110 creates design information with respect to theprofile of the structure; and transmits the created design informationto the shape forming apparatus 120. Further, the created designinformation is stored in a coordinate storage section 151, as will bedescribed later, of the controller 150 by the design apparatus 100.Here, the design information is information indicating coordinates ofeach position of the structure. The shape forming apparatus 120 createsthe structure based on the design information inputted from the designapparatus 110. The shape-forming of the shape forming apparatus 120includes, for example, casting, forging, and cutting. The profilemeasuring apparatus 100 measures the coordinates of the createdstructure (object 3) to transmit information (profile information)indicating the measured coordinates to the controller 150.

The controller 150 includes the coordinate storage section 151 and aninspection section 152. As described above, the design information isstored in the coordinate storage section 151 by the design apparatus110. The inspection section 152 reads the design information from thecoordinate storage section 151. The inspection section 152 comparesinformation (profile information) which indicates the coordinatesreceived from the profile measuring apparatus 100 and the designinformation read from the coordinate storage section 151.

The inspection section 152 judges as to whether or not the structure iscreated in accordance with the design information based on thecomparison result. In other words, the inspection section 152 judges asto whether or not the created structure is a nondefective structure. Ina case that the structure is not created in accordance with the designinformation, the inspection section 152 judges as to whether or not thestructure is repairable. In a case that the structure is repairable, theinspection section 152 calculates a defective portion and a repairamount based on the comparison result to transmit, to the repairapparatus 140, information indicating the defective portion andinformation indicating the repair amount.

The repair apparatus 140 processes the defective portion of thestructure based on the information indicating the defective portion andthe information indicating the repair amount received from thecontroller 150.

FIG. 13 is a flowchart showing a processing flow of the structuremanufacturing system 200. At first, the design apparatus 110 creates thedesign information with respect to the profile of the structure (stepS201). Next, the shape forming apparatus 120 creates the structure basedon the design information (step S202). Next, the profile measuringapparatus 100 measures the profile of the created structure (step S203).Next, the inspection section 152 of the controller 150 inspects as towhether or not the structure is created in accordance with the designinformation by comparing the profile information obtained from theprofile measuring apparatus 100 with the design information (step S204).

Next, the inspection section 152 of the controller 150 judges as towhether or not the created structure is nondefective (step S205). In acase that the inspection section 152 judges that the created structureis nondefective (step S205; Yes), the structure manufacturing system 200completes the process. In a case that the inspection section 152 judgesthat the created structure is defective (step S205: No), the inspectionsection 152 of the controller 150 judges as to whether or not thecreated structure is repairable (step S206).

In a case that the inspection section 152 judges that the createdstructure is repairable (step S206: Yes) the repair apparatus 140executes reprocessing of the structure (step S207) and then the processis returned to the step S103. On the other hand, in a case that theinspection section 152 judges that the created structure is notrepairable (step S206: No), the structure manufacturing system 200completes the process. With that, the process of this flowchart iscompleted.

Accordingly, since the profile measuring apparatus 100 as described inany of the above embodiments can accurately measure the coordinates(three-dimensional profile) of the structure, the structuremanufacturing system 200 is capable of judging as to whether or not thecreated structure is nondefective. In a case that the structure isdefective, the structure manufacturing system 200 can execute thereprocessing of the structure to repair the structure.

Hereinabove, the explanations were made in detail with respect to theembodiments of the present teaching with reference to the drawings.However, the specific construction is not limited to those in theseembodiments, but can possibly be changed as appropriate withoutdeparting from its spirit or scope.

The control sections provided for the control unit 40 and each of thedevices in each of the embodiments (hereinafter, these are generallyreferred to as a controller CONT) or each of the sections provided forthe controller CONT can be realized by dedicated hardware, or can berealized by a memory and a microprocessor.

The controller CONT or each of the sections provided for the controllerCONT can be realized by the dedicated hardware. Further, functions ofthe controller CONT or each of the sections provided for the controllerCONT can be realized as follows. That is, the controller CONT or each ofthe sections provided for the controller CONT is configured by thememory and a Central Processing Unit (CPU); and a program for realizingthe functions of the controller CONT or each of the sections providedfor the controller CONT is loaded into the memory and is executed.

The process executed on the controller CONT or each of the sectionsprovided for the controller CONT can be performed as follows. That is,the program for realizing functions of the controller CONT or each ofthe sections provided for the controller CONT is stored in anon-transitory computer readable medium; the program stored in thenon-transitory computer readable medium is read into a computer systemand then is executed. The “computer system” referred to herein includesan operation system (OS) and/or hardware of a peripheral device and thelike.

In a case that a WWW system is utilized, the “computer system” alsoincludes a homepage viewable environment. The “non-transitory computerreadable medium” refers to a portable medium such as a flexible disk,magneto optical disk, ROM, and CD-ROM; and a memory device such as ahard disk built in the computer system. Further, like a network (e.g.,the Internet) and/or a communication wire used when the program istransmitted via a communication line (e.g., a telephone line), the“non-transitory computer readable medium” also includes a device fordynamically storing the program in a short period of time and/or adevice for storing the program in a certain period of time, such as avolatile memory in the computer system which functions as a server orclient when the program is stored dynamically in the short period oftime. Further, the program can realize a part of the functions asdescribed above; or the program can be realized in combination withanother program, of which functions as described above are stored in thecomputer system in advance.

What is claimed is:
 1. A profile measuring apparatus which measures athree dimensional profile of an object having a plurality of convexportions and a plurality of concave portions, the apparatus comprising:a stage configured to receive the object thereon; a detection section;an irradiation section mounted in the detection section and configuredto irradiate a linear-shaped measurement light onto an area on a surfaceof the object; an imaging section configured to obtain an image of theirradiated area, the imaging section being mounted in the detectionsection in a fixed relationship with the irradiation section; acoordinate calculation section configured to calculate a position of theirradiated area, based on the obtained image; a relative-movementsection configured to: create relative rotational movement between thedetection section and the stage; and create translational movement ofthe detection section with respect to the object; and, a controllerconfigured to control the relative-movement section such that therelative-movement section creates the relative rotational movement andthe translational movement while maintaining a state in which an imagingdirection of the imaging section is set in accordance with a shape ofone of a convex portion or a concave portion in the irradiated area,wherein the irradiation section is further configured to tilt alongitudinal direction of the linear-shaped measurement light withrespect to both (a) a direction of the relative rotational movement and(b) at least one of a ridge-line direction of the convex portion in theirradiated area and an extending direction of the concave portion in theirradiated area.
 2. The profile measuring apparatus according to claim1, wherein the relative-movement section moves the irradiation sectionto a position such that an irradiating direction of the measurementlight is perpendicular to the irradiated area.
 3. The profile measuringapparatus according to claim 1, wherein the relative-movement sectionincludes a rotational-movement section configured to rotate the stagealong a circumferential direction of the object; the controller controlsthe imaging section to take a plurality of images of the irradiated areawhen the rotational-movement section rotates the stage; and thecoordinate calculation section measures a plurality of concave-convexshapes based on the images.
 4. The profile measuring apparatus accordingto claim 3, further comprising: a holding section configured to hold theirradiation section and the imaging section, wherein therelative-movement section moves the holding section relative to thestage.
 5. The profile measuring apparatus according to claim 3, whereinthe relative-movement section displaces the irradiated area in adirection intersecting with a rotational direction of the stage, whenthe relative-movement section rotates the stage in the rotationaldirection.
 6. The profile measuring apparatus according to claim 1,further comprising: a velocity control section configured to control avelocity of the rotational movement between the detection section andthe stage, based on a position of the irradiated area in a radialdirection of the object.
 7. The profile measuring apparatus according toclaim 1, further comprising: an imaging-section control sectionconfigured to change an imaging interval of the imaging section based ona position of the irradiated area in the radial direction of the object.8. The profile measuring apparatus according to claim 1, wherein therelative-movement section rotates the object so that a central axis ofthe object coincides with a rotational axis of the rotational movement.9. The profile measuring apparatus according to claim 4, furthercomprising: a storage section configured to store information associatedwith an extending direction of the convex-concave shapes; and aposition-detection section configured to detect a position of theimaging section; wherein the controller is configured to: obtain, fromthe position-detection section, the position of the imaging section;obtain the information from the storage section; and control therelative-movement section to create a translational movement along theextending direction according to the information.
 10. The profilemeasuring apparatus according to claim 1, wherein the irradiationsection includes an irradiation light system configured to generate themeasurement light and distribute the measurement light in a line whenthe measurement light is irradiated onto a plane.
 11. The profilemeasuring apparatus according to claim 10, wherein the irradiationsection irradiates the measurement light so that the line intersectswith the circumferential direction of the object.
 12. A method formeasuring a three dimensional profile of an object, comprising;preparing a profile measuring apparatus including: an irradiationsection configured to irradiate a linear-shaped measurement light to anarea on a surface of the object having a concave-convex shape which isformed repeatedly in a circumferential direction of the object andextends in a direction different from the circumferential direction; animaging section configured to obtain an image of the irradiated area;and a measurement section configured to measure the profile of theobject, based on the obtained image, irradiating the measurement lightto the surface of the object in a first direction, which is determinedcorresponding to a normal direction of the surface; obtaining the imageof the measurement light from a second direction which is determinedaccording to a shape of the concave-convex shape, and tilting alongitudinal direction of the linear-shaped measurement light withrespect to both (a) a direction of the relative rotational movement and(b) at least one of a ridge-line direction of a convex portion in theirradiated area and an extending direction of a concave portion in theirradiated area.
 13. A non-transitory computer readable medium storing aprogram which allows a computer to execute a method for measuring athree dimensional profile, the computer as a profile measuring apparatusincluding: an irradiation section configured to irradiate alinear-shaped measurement light to an area on a surface of an objecthaving a concave-convex shape which is periodically aligned in acircumferential direction of the object and extends in a directiondifferent from the circumferential direction, an imaging sectionconfigured to obtain an image of the irradiated area; and a measurementsection configured to measure the profile of the object based on theobtained image, the method comprising: irradiating the measurement lightto the irradiated area in a first direction, which is determinedcorresponding to a normal direction of the surface; obtaining the imageof the measurement light from a second direction which is determinedcorresponding to a shape of the concave-convex shape in the irradiatedarea; and tilting a longitudinal direction of the linear-shapedmeasurement light with respect to both (a) the circumferential directionof the object and (b) at least one of a ridge-line direction of a convexportion in the irradiated area and an extending direction of a concaveportion in the irradiated area.
 14. A profile measuring apparatus whichmeasures a three dimensional profile of an object having aconcave-convex shape arranged periodically, the apparatus comprising: astage configured to receive the object thereon; a light irradiatorconfigured to irradiate a linear-shaped measurement light onto an areaof the surface of the object; an imaging device configured to obtain animage of the irradiated area; and a rotational movement sectionconfigured to create rotational movement of the stage relative to theimaging device; wherein the light irradiator is further configured totilt a longitudinal direction of the linear-shaped measurement lightwith respect to both (a) a direction of the relative rotational movementand (b) at least one of a ridge-line direction of a convex portion inthe irradiated area and an extending direction of a concave portion inthe irradiated area.
 15. The profile measurement apparatus according toclaim 14, further comprising: a probe section in which the lightirradiator and the imaging device are mounted; and a relative-movementsection configured to move the probe section in a direction differentfrom the direction of the rotational movement of the stage.
 16. Theprofile measurement apparatus according to claim 15, further comprising:a probe rotating section configured to rotate the probe section relativeto the relative-movement section.
 17. The profile measurement apparatusaccording to claim 16, further comprising: a memory storing informationregarding at least one of the ridge-line direction of the convex portionand the extending direction of the concave portion.
 18. The profilemeasurement apparatus according claim 16, wherein the probe rotatingsection is configured to rotate the probe section based on the at leastone of a ridge-line direction of the convex portion in the irradiatedarea and an extending direction of the concave portion in the irradiatedarea.
 19. A method for measuring a three dimensional profile of anobject having at least one of convex or concave portions arranged on asurface of the object and along a circumferential direction of theobject, each of the convex or concave portions has an extendingdirection different from the circumferential direction, and the methodbeing implemented using a profile measurement apparatus including alight irradiator configured to irradiate a linear-shaped measurementlight onto an area of the surface of the object; an imaging deviceconfigured to obtain an image of the irradiated area; a measurementsection configured to measure the three-dimensional profile of theobject based on the image; and a movement section configured to move thelight irradiator relative to the object in a first direction along thecircumferential direction; the method comprising: moving, by themovement section, the light irradiator relative to the object such thatthe measurement light scans the object in the first direction along thecircumferential direction; tilting a longitudinal direction of thelinear-shaped measurement light with respect to both (a) thecircumferential direction of the object (b) at least one of a ridge-linedirection of a convex portion in the irradiated area and an extendingdirection of a concave portion in the irradiated area; and obtaining, bythe imaging device, the image of the irradiated area.